SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

PURPOSE:To facilitate forming patterns such as wirings on the surface of predetermined layers without producing defects by a method wherein steps in the surface are so provided as to make the lengths of patterns which pass near the highest parts of the steps shorter or a structure in which there are...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	UEKI KAZUYOSHI, SHIMODA MAKI, BANSHO JUNICHIRO, OONISHI TSUGUHIRO, SENBON TAKASHI, TOMOSAWA AKIHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!