DISPLAY DEVICE FOR SURFACE STATE

PURPOSE:To judge whether it is really a defect or the oil droplet or dirt which is not a defect by observing the surface state of the plate to be inspected as a TV picture. CONSTITUTION:The surface of the plate 8 to be inspected is scanned by the laser beam of an optical unit 1, the surface defect i...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ITOU SHIYUUJI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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