JPS6218363B

A vacuum actuator having a vacuum chamber and an atmospheric chamber separated from each other by a diaphragm, and an actuator rod connected at one end to the diaphragm and extending across the atmospheric chamber to the outside of the actuator so as to be connected to an object to be actuated. At l...

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Bibliographische Detailangaben
Hauptverfasser: KOMATSUZAKI KYOMI, NAGANAMI KENICHI, HORIBE KYOSHI, SATO TOSHIKATSU
Format: Patent
Sprache:eng
Schlagworte:
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