FULL SURFACE BLOW OFF CEILING FACILITIES IN VERTICAL LAMINAR FLOW TYPE CLEAN ROOM

PURPOSE:To increase the filter area ratio and effectively discharge minute powdery dusts within a room by aligning a large number of filter units in a longitudinal direction and a horizontal direction and coupling these units, and providing vent holes at positions which are lower than the filter uni...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OMOMO JUICHIRO, UKAJI MASAAKI
Format: Patent
Sprache:eng
Schlagworte:
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