WAFER MEASURING INSTRUMENT

PURPOSE:To more accurately and more efficiently measure patterns with a variety of widths by providing a slit having an opening with a width changeable within a predetermined range, changing the width within the predetermined range and using integral and differential measurement together. CONSTITUTI...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAMIKI YOSHIJI, IRIKITA NOBUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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