OXIDIZING DEGREE JUDGING APPARATUS OF COPPER OXIDE FILM

PURPOSE:To measure the degree of oxidation of a copper oxide film simply and accurately, by judging the oxidizing degree of a sample to be examined based on the correlation coefficient between the distribution forms of the sample to be examined and the spectral reflectance of a standard sample, whose oxidizing degree is known or based on the value of the product and the sum of deviations. CONSTITUTION:Direct light from a light source 1 or light reflected by a reflecting mirror 2 is inputted to a lighting light guide 4 through a heat reflecting body 3. A sample to be examined 6 comprising pure copper or a copper oxide film is lit by said light through an end part 5 of the light guide. The reflected light, which is yielded by the sample to be examined 6 in correspondence with the oxidizing degree of the sample based on the lighting, is introduced to a receiving light guide 7 and further introduced into a photoelectric converter 9 through a psectroscope 8. Photoelectric conversion is performed by the photoelectric converter 9 for every wavelength component. The intensity of the reflected light, which is detected in this way, undergoes A/D conversion and the like through an interface circuit 10. The result is inputted to a data processing device 11. The correlation coefficient between the result and the spectral reflectance of a standard sample having known oxidizing degree, which is prepared beforehand, is computed.