LEAK APPARATUS

PURPOSE:To prevent the dust frmation in a vacuum container by introducing leaked gas little by little into the vacuum container at the initial stage of leak of the vacuum container. CONSTITUTION:When a valve 28 is opened, the leaked gas branched from a leaked-gas introducing line 26 into a branched...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KOHAMA ATSUSHI, HAMAZAKI RIYOUJI, KUDOU KATSUYOSHI
Format: Patent
Sprache:eng
Schlagworte:
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