CLEAN ROOM

PURPOSE:To maintain the stability of air pressure between processing spaces to prevent the air flow turbulence so that dusts may not attach to wafers by disposing shutter plates whose size is made adjustable to at least either one of air outlets in the side walls of the respective processing spaces...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAKAGAKI TETSUYA, NISHIZUKA HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BLASTING HEATING LIGHTING MECHANICAL ENGINEERING RANGES VENTILATING WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!