MANUFACTURE OF SEMICONDUCTOR DEVICE

PURPOSE:To simplify the manufacturing process and to enable an interlayer insulation film to be sufficiently flattened, by providing an insulation layer, a first wiring layer, a second insulation layer and a photoresist layer, forming an opening in a part of the photoresist layer, and etching the wh...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ISHITANI HIROSHI, ABE TOSHIHIRO, KITANO MASAYUKI, KUROE YASUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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