ELEMENT MICRO-ANALYSIS

PURPOSE:To enable to analyze microcomposition with little influence of the difference in the element combining energy on the sample surface, by generating an aberration over the sample surface with a large amount of picked up ion from an instant discharge. CONSTITUTION:After a power supply unit 14 i charged up to a specific charge level and the switch 15 is on, an instant and strong discharge occurs between electrodes 4a and 4b, and the reacted gas is ionized to generate a large amount of primary ions. The primary ions are accelerated by an electrode 5 toward a slit 7 while focused by a magnetic ring 6, and emitted from the slit 7 to a sample 8 as ion beams. On the surface of the sample, there occurs an aberration when receiving the primary ion beams emission, and the ionized sample contents are made into secondary ions, being emitted from its surface. The secondary ions are picked up by a pickup electrode 9, accelerated to a slit 11 while separated according to their different masses in a magnetic field of a magnet ring 10, delivered to a detector 12 one by one, and the mass spectrum is measured by the analysis and recording unit 13.