FORMATION OF ELECTRODE FOR SEMICONDUCTOR ION SENSOR

PURPOSE:To improve the productivity of a semiconductor ion sensor by coating a photosensitive resin on an element substrate on which an ion sensitive film is coated, subjecting the resin to photoengraving and coating a metallic layer thereon, then removing the photosensitive resin thereby forming th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HANASATO YOSHIO, NAKAKO MAMIKO
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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