FORMATION OF THIN FILM

PURPOSE:To form a thin film of uniform thickness on the entire region by supplying RF power to each of 3-5 electrode lines of odd and even numbers from a single unit of power supply through a matching circuit and electrical element and by changing electrical constants of electric elements. CONSTITUT...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HIRATA HISANORI, NISHIMURA KUNIO, NAKAYAMA TAKEHISA, IZUMINA MASANOBU, TSUSHIMO KAZUNAGA, OWADA YOSHIHISA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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