CLEAN ROOM

PURPOSE:To prevent introduction of air from worker's area into highly clean area and keep the highly clean area in a predetermined cleanness stably by a constitution wherein air, which flows from the highly clean area into the worker's area or equipment protecting area, is made to circulat...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ISHIKAWA KATSUHIKO, KOJIMA AKIRA, WAKIYAMA FUMITOSHI, TANABE YOSHIKAZU
Format: Patent
Sprache:eng
Schlagworte:
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