COOLING METHOD OF COOLING CAN

PURPOSE:To cool effectively a can with a less refrigerant in the stage of cooling a cylindrical can for transferring a high polymer film on the surface of which a thin film of a ferromagnetic metal is to be deposited by evaporation by evacuating the inside of the can and evaporating the refrigerant...

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Hauptverfasser: SHIRAHATA RIYUUJI, UENO WATARU, KITAMOTO TATSUJI
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Sprache:eng
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creator SHIRAHATA RIYUUJI
UENO WATARU
KITAMOTO TATSUJI
description PURPOSE:To cool effectively a can with a less refrigerant in the stage of cooling a cylindrical can for transferring a high polymer film on the surface of which a thin film of a ferromagnetic metal is to be deposited by evaporation by evacuating the inside of the can and evaporating the refrigerant with the inside wall surface. CONSTITUTION:While a high polymer film 3 of polyester, etc. is transferred by a cylindrical cooling can 4 under rotation in a vacuum vessel 1, a film deposited by evaporation is formed on the surface of said film by vapor flow 9 of the ferromagnetic metal in a crucible 7 by electron rays 6. The inside of the can 4 is evacuated in this case and a refrigerant such as water is evaporated under reduced pressure from the fine holes 15 on the inside surface of a water pipe 14 installed zigzag on the inside circumferential surface. The can 4 is effectively cooled by the heat of vaporization in such evaporation by which the can 4 and the film 3 in contact therewith are cooled with the smaller amt. of the refrigerant. The thin film of the ferromagnetic metal is thus stably deposited by evaporotion on the film 3 to a uniform thickness.
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CONSTITUTION:While a high polymer film 3 of polyester, etc. is transferred by a cylindrical cooling can 4 under rotation in a vacuum vessel 1, a film deposited by evaporation is formed on the surface of said film by vapor flow 9 of the ferromagnetic metal in a crucible 7 by electron rays 6. The inside of the can 4 is evacuated in this case and a refrigerant such as water is evaporated under reduced pressure from the fine holes 15 on the inside surface of a water pipe 14 installed zigzag on the inside circumferential surface. The can 4 is effectively cooled by the heat of vaporization in such evaporation by which the can 4 and the film 3 in contact therewith are cooled with the smaller amt. of the refrigerant. 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subjects BASIC ELECTRIC ELEMENTS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SEMICONDUCTOR DEVICES
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title COOLING METHOD OF COOLING CAN
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