LEAD-IN DEVICE FOR LEAK GAS IN VACUUM EXHAUST SYSTEM

PURPOSE:To make fine adjustment for a leak gas flow rate ever so easy as well as to complete a leak in a short time without making minute duct inside a vacuum chamber flying up, by installing a buffer tank in position between the vacuum chamber and a leak gas source and also installing a leak valve...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OKA SATOHIKO, SAITOU NAOTAKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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