SHAPE DETECTING APPARATUS

PURPOSE:To effect stabilized shape detection of a surface of plate, by mounting a hollow multi-division rotor of nonmagnetic material provided with heat-resisting property so that a gap is maintanined by air injection between shaft and outerperiphery of the shaft. CONSTITUTION:On a hollow fixed shaf...

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Bibliographische Detailangaben
1. Verfasser: HIGUCHI KINICHI
Format: Patent
Sprache:eng
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