SEPARATING METHOD OF SEMICONDUCTOR ELEMENT

PURPOSE:To form a separating oxide film selectively and to prevent the yield of bird's beaks, by utilizing the difference in oxidizing speeds, and forming an element-separating thick oxide film in a region other than an active region. CONSTITUTION:A silicon oxide film 2 is formed on the surface...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KIYOZUMI FUMIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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