PREPARATION OF PARTIAL GRATING

PURPOSE:To obtain the partial grating easily by forming a negative type resist film onto a substrate, coating a grating forming prearranged section with a mask, exposing an exposed resist film, developing the film and removing the resist film of a developing section, and etching the substrate while...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOUNO HIDETAKA, YAMAMOTO KAZUHISA, FUKUDA YOUJI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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