FLOW RATE DETECTOR

PURPOSE:To detect the small flow rate of cryogenic vaporizing fluid, etc., precisely by using the value Cv that a valve lift controller which controls a flow rate control valve outputs and the differential pressure in fluid pressure between an upstream and a downstream side close to the flow rate co...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TOKIYOSHI KAZUFUMI, TAKEHARA AKIRA, HIRATA DAISAKU, OKAMOTO NOBUICHI, HIROTA SHIGEYUKI, ARAI MINORU
Format: Patent
Sprache:eng
Schlagworte:
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