JPS5931852B
PURPOSE:To achieve the reduction of preliminary exposure time by using patterns wherein a large number of small patterns of a quadrilateral are assembled and arrayed.
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| creator | NISHIZUKA HIROSHI |
| description | PURPOSE:To achieve the reduction of preliminary exposure time by using patterns wherein a large number of small patterns of a quadrilateral are assembled and arrayed. |
| format | Patent |
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| language | eng |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES |
| title | JPS5931852B |
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