FILTER APPARATUS

PURPOSE:To obtain a filter apparatus capable of being easily attached from a clean room side and high in airtightness, by a method wherein the gap between a rubber packing and an attaching frame is filled with a liquid seal material uniformly in a wide range when a support frame is clamped and fixed to the attaching frame. CONSTITUTION:The V-shaped pleats 28a, 28b of a rubber packing 28 inlaid with and mounted to the packing groove 17 of a filter support frame 16 are filled with a liquid seal material 29. Therefore, because the pleats 28a, 28b of the rubber packing 28 are forced open by the attaching frame 22 when the support frame 16 is clamped and fixed to the attaching frame 22, the gap between the rubber packing 28 and the attaching frame 22 is uniformly filled with the liquid seal material 29 in a wide range. As the result, there is no fear generating a gap resulting in air leakage at all even if the support frame 16 is moved and adjusted and airtightness is extremely enhanced. In addition, exchange workability is good because a filter apparatus can be attached from a clean room side.