CONTAINER CARRIER OF SEMICONDUCTOR WAFER

PURPOSE:To prevent wafers from being damaged and reacting by processing chemical solution to be provided with the strength required for supplying, containing and storing themselves by a method wherein core materials made of rigid body is buried in a box unit injection-molded by copolymer resin of te...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUGANUMA TATSUMI, NAKAMURA JIYUNICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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