MARK DETECTION APPARATUS

MARK DETECTION APPARATUS

PURPOSE:To accurately detect a mark by comparing and discriminating an amplitude of charged particle beam signal generated from a sample by the charged particle beam scanning with the reference value. CONSTITUTION:A peak-to-peak D1 of a signal obtained by scanning of dust 16 with a beam is detectect...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YUASA TETSUO, KOSAKA YASUYUKI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PURPOSE:To accurately detect a mark by comparing and discriminating an amplitude of charged particle beam signal generated from a sample by the charged particle beam scanning with the reference value. CONSTITUTION:A peak-to-peak D1 of a signal obtained by scanning of dust 16 with a beam is detectected 9, and it is compared and discriminated from the reference value D0. When D1>D0, the signal ''0'' is generated and dust can be detected. Thereby, a control unit 11 resets a counter 12 and forces a scanning signal generator 15 to change the scanning starting point by issuing a command. When the beam scans the mark 5, a peak-to-peak D2 is detected 9 and is compared and discriminated from the reference value D0. When D2