MANUFACTURE OF SOLID-STATE IMAGE PICKUP ELEMENT
PURPOSE:To improve the photo utilization factor and the sensitivity by forming a filter composed of a photo transmitting ultraviolet ray hardened film of different thickness on a photo receiving part by a method wherein an Si substrate whereon the photo receiving part is formed is coated with ultrav...
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| creator | KANESAKA KAZUMI MIYATA KIYOYUKI HORIUCHI TSUNEHISA IZUMI AKIYA TANABE TATSUO |
| description | PURPOSE:To improve the photo utilization factor and the sensitivity by forming a filter composed of a photo transmitting ultraviolet ray hardened film of different thickness on a photo receiving part by a method wherein an Si substrate whereon the photo receiving part is formed is coated with ultraviolet ray hardened type resin over the entire surface and exposed and then hardened, and thus the process of exfoliating and removing the ultraviolet ray hardened type resin at unexposed parts is performed. CONSTITUTION:The upper surface of the color filter part 5 of a solid-state image pickup element is coated with photo transmitting ultraviolet ray hardened type resin over the entire surface and dried, and accordingly the ultraviolet ray hardened type resin film 9 is formed. After exposing and hardening only resin films 9 on the photo receiving parts 3a-3d with ultraviolet rays 11, the resin films 9 at unexposed parts are developed resulting in exfoliation-removal, and thus hardened resin film patterns 12a are formed on photo transmitting protection films 6c corresponding to the photo receiving parts 3a-3d. Thereafter, they are stabilized by baking. After such a process is repeated by once or a plurality of times, and thus one or several layer hardened resin film patterns 12a, 12b... are lamination-formed, a protection film 13 is formed thereon, resulting in the formation of a photo transmitting filter having a projection surface. |
| format | Patent |
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CONSTITUTION:The upper surface of the color filter part 5 of a solid-state image pickup element is coated with photo transmitting ultraviolet ray hardened type resin over the entire surface and dried, and accordingly the ultraviolet ray hardened type resin film 9 is formed. After exposing and hardening only resin films 9 on the photo receiving parts 3a-3d with ultraviolet rays 11, the resin films 9 at unexposed parts are developed resulting in exfoliation-removal, and thus hardened resin film patterns 12a are formed on photo transmitting protection films 6c corresponding to the photo receiving parts 3a-3d. Thereafter, they are stabilized by baking. After such a process is repeated by once or a plurality of times, and thus one or several layer hardened resin film patterns 12a, 12b... are lamination-formed, a protection film 13 is formed thereon, resulting in the formation of a photo transmitting filter having a projection surface.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC COMMUNICATION TECHNIQUE ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PHYSICS ; PICTORIAL COMMUNICATION, e.g. TELEVISION ; SEMICONDUCTOR DEVICES</subject><creationdate>1984</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19840119&DB=EPODOC&CC=JP&NR=S5910266A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25551,76304</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19840119&DB=EPODOC&CC=JP&NR=S5910266A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KANESAKA KAZUMI</creatorcontrib><creatorcontrib>MIYATA KIYOYUKI</creatorcontrib><creatorcontrib>HORIUCHI TSUNEHISA</creatorcontrib><creatorcontrib>IZUMI AKIYA</creatorcontrib><creatorcontrib>TANABE TATSUO</creatorcontrib><title>MANUFACTURE OF SOLID-STATE IMAGE PICKUP ELEMENT</title><description>PURPOSE:To improve the photo utilization factor and the sensitivity by forming a filter composed of a photo transmitting ultraviolet ray hardened film of different thickness on a photo receiving part by a method wherein an Si substrate whereon the photo receiving part is formed is coated with ultraviolet ray hardened type resin over the entire surface and exposed and then hardened, and thus the process of exfoliating and removing the ultraviolet ray hardened type resin at unexposed parts is performed. CONSTITUTION:The upper surface of the color filter part 5 of a solid-state image pickup element is coated with photo transmitting ultraviolet ray hardened type resin over the entire surface and dried, and accordingly the ultraviolet ray hardened type resin film 9 is formed. After exposing and hardening only resin films 9 on the photo receiving parts 3a-3d with ultraviolet rays 11, the resin films 9 at unexposed parts are developed resulting in exfoliation-removal, and thus hardened resin film patterns 12a are formed on photo transmitting protection films 6c corresponding to the photo receiving parts 3a-3d. Thereafter, they are stabilized by baking. 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CONSTITUTION:The upper surface of the color filter part 5 of a solid-state image pickup element is coated with photo transmitting ultraviolet ray hardened type resin over the entire surface and dried, and accordingly the ultraviolet ray hardened type resin film 9 is formed. After exposing and hardening only resin films 9 on the photo receiving parts 3a-3d with ultraviolet rays 11, the resin films 9 at unexposed parts are developed resulting in exfoliation-removal, and thus hardened resin film patterns 12a are formed on photo transmitting protection films 6c corresponding to the photo receiving parts 3a-3d. Thereafter, they are stabilized by baking. After such a process is repeated by once or a plurality of times, and thus one or several layer hardened resin film patterns 12a, 12b... are lamination-formed, a protection film 13 is formed thereon, resulting in the formation of a photo transmitting filter having a projection surface.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION SEMICONDUCTOR DEVICES |
| title | MANUFACTURE OF SOLID-STATE IMAGE PICKUP ELEMENT |
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