CONVEYING SYSTEM OF SEMICONDUCTOR WAFER

PURPOSE:To facilitate control of production schedule of a semiconductor device by a computer by a method wherein a card formed in the same type with a semiconductor wafer is accomodated in a carrier being made as to correspond to one sheet of the semiconductor wafer, while perforations concerning th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUGANUMA TATSUMI, ROKUSHIYA TERUMI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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