DEVICE FOR ACCURATELY MEASURING DIMENSION

PURPOSE:To perform non-contact continuous efficient measurement without stopping a polishing machine, by finding out the change in the distance between a distance detector on a correction ring and the top of a weight on a fixation plate holding a workpiece secured on the bottom of the plate. during...

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Hauptverfasser: KIKUCHI KATSUHIKO, SANO TAKASHI, NAKAOKA JIYUNICHI
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Sprache:eng
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creator KIKUCHI KATSUHIKO
SANO TAKASHI
NAKAOKA JIYUNICHI
description PURPOSE:To perform non-contact continuous efficient measurement without stopping a polishing machine, by finding out the change in the distance between a distance detector on a correction ring and the top of a weight on a fixation plate holding a workpiece secured on the bottom of the plate. during polishing work. CONSTITUTION:A workpiece 2 is bonded to the bottom of a fixation plate 3 located over a surface plate 1 made of a hard cloth, ceramic or the like. A weight 4 is placed on the top of the fixation plate 3. A ring 5 for correcting the flatness of the surface plate 1 is placed with a prescribed gap to the peripheral surface of the fixation plate 3. An eddy current detector 8 is secured by a support 6 on the ring 5. As the thickness of the workpiece 2 decreases due to the polishing of the workpiece by rotating the fixation plate 3, the distance between the tip of the detector 8 and the top of the weight 4 increases so that the voltage of the detector changes. The voltage is applied to a calculator 9. When the polished quantity has reached a target, a signal is entered into a controller 10 to stop driving.
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subjects DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PERFORMING OPERATIONS
PHYSICS
POLISHING
TESTING
TRANSPORTING
title DEVICE FOR ACCURATELY MEASURING DIMENSION
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