MANUFACTURE OF SEMICONDUCTOR DEVICE
PURPOSE:To obtain a semiconductor chip having excellent die bonding properties, by a method wherein after a semiconductor element region is formed on one main surface of a semiconductor substrate, a silicon layer is formed on the back surface. CONSTITUTION:A semiconductor element region 2 is formed...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PURPOSE:To obtain a semiconductor chip having excellent die bonding properties, by a method wherein after a semiconductor element region is formed on one main surface of a semiconductor substrate, a silicon layer is formed on the back surface. CONSTITUTION:A semiconductor element region 2 is formed on the surface of a semiconductor substrate 1, while an Si layer 3 is formed on the back surface thereof. A chip 4 obtained by dividing said semiconductor substrate is secured to a semiconductor package 5 through an Au-Si eutectic alloy layer 6. Thereby, a semiconductor chip is obtained having excellent die bonding properties in securing it to a semiconductor package. |
---|