CHARGED PARTICLE BEAM IRRADIATING APPARATUS AND SCANNING ELECTRON MICROSCOPE USING THE SAME

PROBLEM TO BE SOLVED: To automatically restrain a movement range for avoiding contact of a sample with device constituting members and to use a charged particle beam irradiating apparatus safely and easily by restraining the movement range of a sample moving mechanism, based on at least one piece of...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	GUNJI KAZUHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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