SHAPE MEASURING EQUIPMENT
PROBLEM TO BE SOLVED: To provide shape measuring equipment which can simply measure a complex three-dimensional shape including a free curved surface of an object to be measured with high precision, irrespective of conductor or non-conductor. SOLUTION: When an object 4 to be measured is moved in the...
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| creator | HIRONO AYUMI |
| description | PROBLEM TO BE SOLVED: To provide shape measuring equipment which can simply measure a complex three-dimensional shape including a free curved surface of an object to be measured with high precision, irrespective of conductor or non-conductor. SOLUTION: When an object 4 to be measured is moved in the vertical direction Z with an X-Y-Z stage 6, the object 4 to be measured is brought into contact with the tip part 7d of a probe 7, which is deflected. An image processing part calculates a specified feature parameter from an image of the probe 7 sensed by an optical microscoope 9. A contact judging part judges contact and existence of sticking, on the basis of the specified feature parameter calculated by the image processing part. A total controlling part controls the X-Y-Z stage 6, scans the surface of the object 4 to be measured in the vertical direction Z and the horizontal directions X, Y, and obtains a three-dimensional coordinates of the surface of the object 4 to be measured on the basis of the judged results of the contact judging part. |
| format | Patent |
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SOLUTION: When an object 4 to be measured is moved in the vertical direction Z with an X-Y-Z stage 6, the object 4 to be measured is brought into contact with the tip part 7d of a probe 7, which is deflected. An image processing part calculates a specified feature parameter from an image of the probe 7 sensed by an optical microscoope 9. A contact judging part judges contact and existence of sticking, on the basis of the specified feature parameter calculated by the image processing part. A total controlling part controls the X-Y-Z stage 6, scans the surface of the object 4 to be measured in the vertical direction Z and the horizontal directions X, Y, and obtains a three-dimensional coordinates of the surface of the object 4 to be measured on the basis of the judged results of the contact judging part.</description><edition>6</edition><language>eng</language><subject>DETECTING MASSES OR OBJECTS ; GEOPHYSICS ; GRAVITATIONAL MEASUREMENTS ; MEASURING ; MEASURING ANGLES ; MEASURING AREAS ; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ; PHYSICS ; TESTING</subject><creationdate>1999</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19991224&DB=EPODOC&CC=JP&NR=H11351859A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19991224&DB=EPODOC&CC=JP&NR=H11351859A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HIRONO AYUMI</creatorcontrib><title>SHAPE MEASURING EQUIPMENT</title><description>PROBLEM TO BE SOLVED: To provide shape measuring equipment which can simply measure a complex three-dimensional shape including a free curved surface of an object to be measured with high precision, irrespective of conductor or non-conductor. 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A total controlling part controls the X-Y-Z stage 6, scans the surface of the object 4 to be measured in the vertical direction Z and the horizontal directions X, Y, and obtains a three-dimensional coordinates of the surface of the object 4 to be measured on the basis of the judged results of the contact judging part.</description><subject>DETECTING MASSES OR OBJECTS</subject><subject>GEOPHYSICS</subject><subject>GRAVITATIONAL MEASUREMENTS</subject><subject>MEASURING</subject><subject>MEASURING ANGLES</subject><subject>MEASURING AREAS</subject><subject>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</subject><subject>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1999</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJAM9nAMcFXwdXUMDg3y9HNXcA0M9QzwdfUL4WFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8V4BHoaGxqaGFqaWjsbEqAEAI6wgWA</recordid><startdate>19991224</startdate><enddate>19991224</enddate><creator>HIRONO AYUMI</creator><scope>EVB</scope></search><sort><creationdate>19991224</creationdate><title>SHAPE MEASURING EQUIPMENT</title><author>HIRONO AYUMI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JPH11351859A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1999</creationdate><topic>DETECTING MASSES OR OBJECTS</topic><topic>GEOPHYSICS</topic><topic>GRAVITATIONAL MEASUREMENTS</topic><topic>MEASURING</topic><topic>MEASURING ANGLES</topic><topic>MEASURING AREAS</topic><topic>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</topic><topic>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>HIRONO AYUMI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HIRONO AYUMI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SHAPE MEASURING EQUIPMENT</title><date>1999-12-24</date><risdate>1999</risdate><abstract>PROBLEM TO BE SOLVED: To provide shape measuring equipment which can simply measure a complex three-dimensional shape including a free curved surface of an object to be measured with high precision, irrespective of conductor or non-conductor. SOLUTION: When an object 4 to be measured is moved in the vertical direction Z with an X-Y-Z stage 6, the object 4 to be measured is brought into contact with the tip part 7d of a probe 7, which is deflected. An image processing part calculates a specified feature parameter from an image of the probe 7 sensed by an optical microscoope 9. A contact judging part judges contact and existence of sticking, on the basis of the specified feature parameter calculated by the image processing part. A total controlling part controls the X-Y-Z stage 6, scans the surface of the object 4 to be measured in the vertical direction Z and the horizontal directions X, Y, and obtains a three-dimensional coordinates of the surface of the object 4 to be measured on the basis of the judged results of the contact judging part.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | DETECTING MASSES OR OBJECTS GEOPHYSICS GRAVITATIONAL MEASUREMENTS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING |
| title | SHAPE MEASURING EQUIPMENT |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-11T17%3A53%3A38IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=HIRONO%20AYUMI&rft.date=1999-12-24&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJPH11351859A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |