TANDEM ACCELERATION ELECTROSTATIC LENS
PROBLEM TO BE SOLVED: To realize operation of acceleration mode focusing lenses at a lower voltage compared with a conventional lens. SOLUTION: This device is constituted by superposing acceleration mode focusing electrostatic lenses. One acceleration mode focusing electrostatic lens is formed betwe...
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| creator | NOMURA SADAO |
| description | PROBLEM TO BE SOLVED: To realize operation of acceleration mode focusing lenses at a lower voltage compared with a conventional lens. SOLUTION: This device is constituted by superposing acceleration mode focusing electrostatic lenses. One acceleration mode focusing electrostatic lens is formed between a first, a second and a third electrodes 4a-4c, and another acceleration mode focusing electrostatic lens is formed between the third, a fourth and a fifth lenses 4c-4e. High energy of the ion beam passing through the positions where focusing lens operation is generated keeps a small chromatic aberration coefficient of the acceleration electrostatic lenses. Increase of the number of the positions where the focusing lens operation is generated enables the acceleration mode focusing at a low lens voltage. |
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One acceleration mode focusing electrostatic lens is formed between a first, a second and a third electrodes 4a-4c, and another acceleration mode focusing electrostatic lens is formed between the third, a fourth and a fifth lenses 4c-4e. High energy of the ion beam passing through the positions where focusing lens operation is generated keeps a small chromatic aberration coefficient of the acceleration electrostatic lenses. Increase of the number of the positions where the focusing lens operation is generated enables the acceleration mode focusing at a low lens voltage.</description><edition>6</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>1999</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19991130&DB=EPODOC&CC=JP&NR=H11329321A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19991130&DB=EPODOC&CC=JP&NR=H11329321A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NOMURA SADAO</creatorcontrib><title>TANDEM ACCELERATION ELECTROSTATIC LENS</title><description>PROBLEM TO BE SOLVED: To realize operation of acceleration mode focusing lenses at a lower voltage compared with a conventional lens. SOLUTION: This device is constituted by superposing acceleration mode focusing electrostatic lenses. One acceleration mode focusing electrostatic lens is formed between a first, a second and a third electrodes 4a-4c, and another acceleration mode focusing electrostatic lens is formed between the third, a fourth and a fifth lenses 4c-4e. High energy of the ion beam passing through the positions where focusing lens operation is generated keeps a small chromatic aberration coefficient of the acceleration electrostatic lenses. Increase of the number of the positions where the focusing lens operation is generated enables the acceleration mode focusing at a low lens voltage.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1999</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFALcfRzcfVVcHR2dvVxDXIM8fT3UwCynEOC_INDgFxnBR9Xv2AeBta0xJziVF4ozc2g6OYa4uyhm1qQH59aXJCYnJqXWhLvFeBhaGhsZGlsZOhoTIwaAMwRI8Y</recordid><startdate>19991130</startdate><enddate>19991130</enddate><creator>NOMURA SADAO</creator><scope>EVB</scope></search><sort><creationdate>19991130</creationdate><title>TANDEM ACCELERATION ELECTROSTATIC LENS</title><author>NOMURA SADAO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JPH11329321A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1999</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>NOMURA SADAO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NOMURA SADAO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>TANDEM ACCELERATION ELECTROSTATIC LENS</title><date>1999-11-30</date><risdate>1999</risdate><abstract>PROBLEM TO BE SOLVED: To realize operation of acceleration mode focusing lenses at a lower voltage compared with a conventional lens. SOLUTION: This device is constituted by superposing acceleration mode focusing electrostatic lenses. One acceleration mode focusing electrostatic lens is formed between a first, a second and a third electrodes 4a-4c, and another acceleration mode focusing electrostatic lens is formed between the third, a fourth and a fifth lenses 4c-4e. High energy of the ion beam passing through the positions where focusing lens operation is generated keeps a small chromatic aberration coefficient of the acceleration electrostatic lenses. Increase of the number of the positions where the focusing lens operation is generated enables the acceleration mode focusing at a low lens voltage.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| title | TANDEM ACCELERATION ELECTROSTATIC LENS |
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