MANUFACTURE OF ULTRA-HIGH-PURITY NITROGEN GAS AND DEVICE THEREFOR

PROBLEM TO BE SOLVED: To provide a method for manufacturing ultra-high-purity nitrogen gas that can be effectively utilized with inexpensive facilities. SOLUTION: In a method for filing compressing feed air, cooling it to a low temperature, and then introducing it to a rectifying column 7, performin...

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Bibliographische Detailangaben
Hauptverfasser: KIYAMA HIROMI, KIKUCHI NOBUNAO, MIYAMOTO ATSUSHI
Format: Patent
Sprache:eng
Schlagworte:
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