GALLIUM ION SOURCE

PROBLEM TO BE SOLVED: To prevent the separation of a needle electrode from a filament under storage or transportation and even in long use and can use without anxiety by combining W-Re, or W-Re and W as the materials of the filament and the needle electrode. SOLUTION: Metal powder 7 is put on the jo...

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Bibliographische Detailangaben
Hauptverfasser: TERUI YOSHINORI, KUDO NAOYA, TSUNODA KATSUYOSHI
Format: Patent
Sprache:eng
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