2-AXIS ANGULAR VELOCITY SENSOR

PROBLEM TO BE SOLVED: To make it possible to detect the input angular velocity without influence of the acceleration by driving a ring-like vibration in the diametral direction of orthogonal two axes to mechanically vibrate and detecting the displacement of the ring-like vibration in the diametral direction of the orthogonal two axes. SOLUTION: A conductor semiconductor ring-like vibration 1 with a tetragonal section is fixed to a sensor frame through two pairs of supports 11 which are opposed in the diametral direction and extend in mutually orthogonal directions and composed of metal conductors having a high mechanical strength. A drive element 2 drives and deforms the ring-like vibrator 1 in the diametral direction of two axes x, y to mechanically vibrate a detector element 3 detects the displacement of the ring-like vibrator 1 due to the Coriolis force in a z-axis direction diametral to the axes x, y, a detector circuit 31 arithmetically processes and outputs the input angular velocity from the detect signal of the detector element 3, thereby obtaining a sensor having an elevated detection accuracy, insensitive the acceleration resulting from disagreement of the gravity center of the ring-like vibration 1 from the supports 11.