PHOTOSENSITIVE COMPOSITION AND PATTERN FORMING METHOD

PROBLEM TO BE SOLVED: To obtain the photosensitive composition high in resolution and high enough in sensitivity by incorporating a photo-cross-linking agent of a water-soluble azide compound and a poly-N-vinyl-acetamide(p-NVA) photocross-linkable by this compound. SOLUTION: The photosensitive compo...

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Hauptverfasser: TOCHISAWA TETSUAKI, WATANABE MASAHARU, TAKOSHI HIROTAKA
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creator TOCHISAWA TETSUAKI
WATANABE MASAHARU
TAKOSHI HIROTAKA
description PROBLEM TO BE SOLVED: To obtain the photosensitive composition high in resolution and high enough in sensitivity by incorporating a photo-cross-linking agent of a water-soluble azide compound and a poly-N-vinyl-acetamide(p-NVA) photocross-linkable by this compound. SOLUTION: The photosensitive composition contains the water-soluble azide compound and a poly-N-vinyl-acetamide (p-NVA) photocross-linkable by this compound, and it is preferred that this p-VNA has a molecular weight of 100,000-4,000,000 and a viscosity of 300-70,000 cP from the view point of sensitivity and film forming property and the like. The photosensitive composition can be prepared by dissolving or dispersing p-NVA and the water-soluble azide compound and, when needed, various kinds of additives in a solvent composed mainly of water, and water is generally used as the solvent and water-soluble solvent, such as methanol or ethanol, can be used in an amount of
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SOLUTION: The photosensitive composition contains the water-soluble azide compound and a poly-N-vinyl-acetamide (p-NVA) photocross-linkable by this compound, and it is preferred that this p-VNA has a molecular weight of 100,000-4,000,000 and a viscosity of 300-70,000 cP from the view point of sensitivity and film forming property and the like. The photosensitive composition can be prepared by dissolving or dispersing p-NVA and the water-soluble azide compound and, when needed, various kinds of additives in a solvent composed mainly of water, and water is generally used as the solvent and water-soluble solvent, such as methanol or ethanol, can be used in an amount of &lt;=50 weight%.</description><edition>6</edition><language>eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; BASIC ELECTRIC ELEMENTS ; CHEMISTRY ; CINEMATOGRAPHY ; COMPOSITIONS BASED THEREON ; COMPOSITIONS OF MACROMOLECULAR COMPOUNDS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; METALLURGY ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; ORGANIC MACROMOLECULAR COMPOUNDS ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; THEIR PREPARATION OR CHEMICAL WORKING-UP</subject><creationdate>1999</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19990129&amp;DB=EPODOC&amp;CC=JP&amp;NR=H1124241A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19990129&amp;DB=EPODOC&amp;CC=JP&amp;NR=H1124241A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>TOCHISAWA TETSUAKI</creatorcontrib><creatorcontrib>WATANABE MASAHARU</creatorcontrib><creatorcontrib>TAKOSHI HIROTAKA</creatorcontrib><title>PHOTOSENSITIVE COMPOSITION AND PATTERN FORMING METHOD</title><description>PROBLEM TO BE SOLVED: To obtain the photosensitive composition high in resolution and high enough in sensitivity by incorporating a photo-cross-linking agent of a water-soluble azide compound and a poly-N-vinyl-acetamide(p-NVA) photocross-linkable by this compound. 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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CHEMISTRY
CINEMATOGRAPHY
COMPOSITIONS BASED THEREON
COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
METALLURGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORGANIC MACROMOLECULAR COMPOUNDS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
THEIR PREPARATION OR CHEMICAL WORKING-UP
title PHOTOSENSITIVE COMPOSITION AND PATTERN FORMING METHOD
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