OPTICAL SYSTEM AND EXPOSURE DEVICE AND PRODUCTION OF SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To provide an optical system which substantially prevents the occurrence of a rotationally asymmetrical aberration fluctuation even when the optical members in the optical system like a projection optical system are cooled by a force convection. SOLUTION: The optical system PL including plural optical elements L and holders G respectively holding these plural optical elements L is so constituted that the holders G are provided with medium supply sections 10 for supplying cooling media M to at least one space S formed between the plural optical elements L and further that the system is provided with a control means 20 for changing the direction for supplying the cooling media M with time. If the system is constituted in such a manner, the direction for supplying the cooling media M to the optical elements L changes and, therefore, the optical elements L may be cooled by the cooling media flowing in these directions different with time. More particularly the optical elements L may be maintained at a relatively uniform temp. distribution even with the optical system using a laser of a far IR region liable to be absorbed by the optical elements L, by which the aberrations may be suppressed.