OPTICAL MEASURING SYSTEM

PROBLEM TO BE SOLVED: To obtain an optical measuring system by which a substrate or the thickness or the optical characteristic of a thin-film layer on the substrate is evaluated. SOLUTION: The optical measuring system 1 is provided with a light source 10 which generates a beam of light, a static po...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CRANE DAVID L, BAAENZU GERARD H
Format:	Patent
Sprache:	eng
Schlagworte:	COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS RADIATION PYROMETRY TESTING
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