LIQUID MATERIAL FLOW CONTROL PUMP

LIQUID MATERIAL FLOW CONTROL PUMP

PROBLEM TO BE SOLVED: To prevent contamination of a liquid material by outside air by arranging a gas seal part in a slidingly movable part of a piston to suck in/deliver the liquid material by sliding motion, flowing inert gas here, and enclosing a suction valve and a delivery valve in piping joint...

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Hauptverfasser: YONEYAMA GAKUO, TAKAMATSU YUKICHI, ISHIHAMA YOSHIYASU
Format: Patent
Sprache:eng
Schlagworte:
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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creator YONEYAMA GAKUO
TAKAMATSU YUKICHI
ISHIHAMA YOSHIYASU
description PROBLEM TO BE SOLVED: To prevent contamination of a liquid material by outside air by arranging a gas seal part in a slidingly movable part of a piston to suck in/deliver the liquid material by sliding motion, flowing inert gas here, and enclosing a suction valve and a delivery valve in piping joints welded to a casing. SOLUTION: Inert gas such as nitrogen, argon and helium is passed into this gas seal chamber 7 from an inert gas supply port 8 by defining the gas seal chamber 7 by a gas seal wall 6 between packing 5 and a driving part 4 of a piston 3 fitted/installed in a cylinder 2 formed in a casing 1 of a flow control pump to supply a semiconductor manufacturing liquid material. A suction valve 11 and a delivery valve 12 are enclosed in respective ones by welding suction side and delivery side respective piping joints 9 and 10 to upper and lower parts of the casing. The liquid material is sucked in/delivered according to sliding motion of the piston 3, but in this case, the delivery valve 12 is set to as to be actuated by a pressure difference of about 1 to 100 kg/cm by a spring, etc.
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SOLUTION: Inert gas such as nitrogen, argon and helium is passed into this gas seal chamber 7 from an inert gas supply port 8 by defining the gas seal chamber 7 by a gas seal wall 6 between packing 5 and a driving part 4 of a piston 3 fitted/installed in a cylinder 2 formed in a casing 1 of a flow control pump to supply a semiconductor manufacturing liquid material. A suction valve 11 and a delivery valve 12 are enclosed in respective ones by welding suction side and delivery side respective piping joints 9 and 10 to upper and lower parts of the casing. 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SOLUTION: Inert gas such as nitrogen, argon and helium is passed into this gas seal chamber 7 from an inert gas supply port 8 by defining the gas seal chamber 7 by a gas seal wall 6 between packing 5 and a driving part 4 of a piston 3 fitted/installed in a cylinder 2 formed in a casing 1 of a flow control pump to supply a semiconductor manufacturing liquid material. A suction valve 11 and a delivery valve 12 are enclosed in respective ones by welding suction side and delivery side respective piping joints 9 and 10 to upper and lower parts of the casing. 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subjects BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
title LIQUID MATERIAL FLOW CONTROL PUMP
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