FILM THICKNESS MEASURING METHOD AND FILM THICKNESS MEASURING DEVICE

PROBLEM TO BE SOLVED: To shorten the measurement time without necessitating accurate alignment for a position suitable for film thickness measurement. SOLUTION: A plurality of sampling lines n1 to n5 which obtain a profile of a light receive signal of a picture image cross section are set to judge a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUGIYAMA YASUSHI, BAN MINOKICHI, CHICHII MASARU, SUZUKI TAKEHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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