CORROSION RESISTANT MEMBER

PROBLEM TO BE SOLVED: To obtain a corrosion resistant member having an excellent corrosion resistance against plasma in an atmosphere containing a halogen-based corrosive gas such as a fluorine-based or chlorine-based gas. SOLUTION: This corrosion resistant member is composed of a ceramic sintered c...

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1. Verfasser: HAYAZAKI TETSUJI
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description PROBLEM TO BE SOLVED: To obtain a corrosion resistant member having an excellent corrosion resistance against plasma in an atmosphere containing a halogen-based corrosive gas such as a fluorine-based or chlorine-based gas. SOLUTION: This corrosion resistant member is composed of a ceramic sintered compact comprising >=15 wt.% MgO and =3 μm average crystalline particle diameter of the crystal phase and having
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SOLUTION: This corrosion resistant member is composed of a ceramic sintered compact comprising &gt;=15 wt.% MgO and &lt;=85 wt.% Al2 O3 , in terms of oxides, having any crystal phase of MgO, MgAl2 O4 and MgO, MgAl2 O4 , and MgAl2 O4 and Al2 O3 , further having &gt;=3 μm average crystalline particle diameter of the crystal phase and having &lt;=0.2% porosity.</description><edition>6</edition><language>eng</language><subject>ARTIFICIAL STONE ; BASIC ELECTRIC ELEMENTS ; CEMENTS ; CERAMICS ; CHEMISTRY ; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS ; CONCRETE ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; LIME, MAGNESIA ; METALLURGY ; REFRACTORIES ; SEMICONDUCTOR DEVICES ; SLAG ; TREATMENT OF NATURAL STONE</subject><creationdate>1998</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19981215&amp;DB=EPODOC&amp;CC=JP&amp;NR=H10330150A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25544,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19981215&amp;DB=EPODOC&amp;CC=JP&amp;NR=H10330150A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HAYAZAKI TETSUJI</creatorcontrib><title>CORROSION RESISTANT MEMBER</title><description>PROBLEM TO BE SOLVED: To obtain a corrosion resistant member having an excellent corrosion resistance against plasma in an atmosphere containing a halogen-based corrosive gas such as a fluorine-based or chlorine-based gas. 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SOLUTION: This corrosion resistant member is composed of a ceramic sintered compact comprising &gt;=15 wt.% MgO and &lt;=85 wt.% Al2 O3 , in terms of oxides, having any crystal phase of MgO, MgAl2 O4 and MgO, MgAl2 O4 , and MgAl2 O4 and Al2 O3 , further having &gt;=3 μm average crystalline particle diameter of the crystal phase and having &lt;=0.2% porosity.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record>
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subjects ARTIFICIAL STONE
BASIC ELECTRIC ELEMENTS
CEMENTS
CERAMICS
CHEMISTRY
COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS
CONCRETE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
LIME, MAGNESIA
METALLURGY
REFRACTORIES
SEMICONDUCTOR DEVICES
SLAG
TREATMENT OF NATURAL STONE
title CORROSION RESISTANT MEMBER
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