CORROSION RESISTANT MEMBER

PROBLEM TO BE SOLVED: To obtain a corrosion resistant member having an excellent corrosion resistance against plasma in an atmosphere containing a halogen-based corrosive gas such as a fluorine-based or chlorine-based gas. SOLUTION: This corrosion resistant member is composed of a ceramic sintered c...

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1. Verfasser: HAYAZAKI TETSUJI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To obtain a corrosion resistant member having an excellent corrosion resistance against plasma in an atmosphere containing a halogen-based corrosive gas such as a fluorine-based or chlorine-based gas. SOLUTION: This corrosion resistant member is composed of a ceramic sintered compact comprising >=15 wt.% MgO and =3 μm average crystalline particle diameter of the crystal phase and having