ILLUMINATING SYSTEM, ALIGNER AND DEVICE MANUFACTURE

PROBLEM TO BE SOLVED: To constantly illuminate a plane to be illuminated with a stable illuminance, by detecting the temperature of a illuminance sensor, and cooling the illuminance sensor based on the detected temperature so as to maintain the temperature of the illuminance sensor at a prescribed v...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SHIMEKI KOUICHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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