PHOTON INTEGRATED CIRCUIT AND ITS FABRICATION METHOD

PROBLEM TO BE SOLVED: To make a surface of a photon integrated circuit flat by growing a waveguide stack including a waveguide layer and an active layer on a substrate, forming a waveguide by etching partially, growing blocking layers on an active region and a passive waveguide, forming a trench on...

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Bibliographische Detailangaben

1. Verfasser:	KOREN UZIEL
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES
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