CASSETTE CONVEYING VEHICLE
PROBLEM TO BE SOLVED: To prevent accumulation and scattering of dust on an upper plate by forming an inlet for a cassette on a high position side side plate in the upper plate of a slantingly arranged conveying vehicle. SOLUTION: On side plate 32 on the high position side of an upper plate 31 in a s...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To prevent accumulation and scattering of dust on an upper plate by forming an inlet for a cassette on a high position side side plate in the upper plate of a slantingly arranged conveying vehicle. SOLUTION: On side plate 32 on the high position side of an upper plate 31 in a slantingly arranged cassette conveying vehicle 3, an inlet 32a for a cassette 5 is formed, and the cassette 5 can be transferred to/from production equipment in a production equipment chamber A via the inlet 32a and an opening 1a formed in a partition wall 1. In this way, accumulation of dust is hardly caused on the upper plate 31 as the upper plate 31 is arranged slantingly, while downflow flowing inside a conveying chamber B flows downward smoothly along the upper plate 31 and a side plate 33 on the low position side of the upper plate 31, so that dust on the upper plate 31 is prevented from scattering. |
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