DEVICE AND METHOD FOR STREAM VERIFICATION

PROBLEM TO BE SOLVED: To make it possible to conduct an optimum indication, an error part and its correction on layout data based on the result of a stream check by a method wherein an optimum indication flag, with which the image indication of an optical error part is accomplished, is analyzed by a...

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creator ISHIBASHI MANABU
description PROBLEM TO BE SOLVED: To make it possible to conduct an optimum indication, an error part and its correction on layout data based on the result of a stream check by a method wherein an optimum indication flag, with which the image indication of an optical error part is accomplished, is analyzed by an indication judging part when the error part is corrected. SOLUTION: Layout pattern data 1 is format-converted to STREAM data 3 by a data format converting part 2, and an error list file 5 is outputted by conducting the error check of the STREAM data 3 by a STREAM check part 4. Also, optimum indicating flag, which indicates the picture of an error part when the error content is corrected, is analyzed by an indication judging part 6 based on the error list file 5, and the result is added to the error list file 5. The information of the error list file 7, where the layout pattern data 1 and the result of analysis are added, is read in by the indication control part 8, and error items are indicated on the picture.
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SOLUTION: Layout pattern data 1 is format-converted to STREAM data 3 by a data format converting part 2, and an error list file 5 is outputted by conducting the error check of the STREAM data 3 by a STREAM check part 4. Also, optimum indicating flag, which indicates the picture of an error part when the error content is corrected, is analyzed by an indication judging part 6 based on the error list file 5, and the result is added to the error list file 5. 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subjects BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PHYSICS
SEMICONDUCTOR DEVICES
title DEVICE AND METHOD FOR STREAM VERIFICATION
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