CENTRIFUGAL DIFFERENTIAL PRESSURE GENERATING DEVICE

PROBLEM TO BE SOLVED: To provide a centrifugal differential pressure generating device that can generate micro differential pressure with high accuracy by reducing the influence of temperature. SOLUTION: In a centrifugal differential pressure generating device for generating differential pressure of...

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Bibliographische Detailangaben
Hauptverfasser: OIWA AKIRA, KATOU KOUHEI, KAHANE TSUNEMICHI, UEKI MASAAKI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a centrifugal differential pressure generating device that can generate micro differential pressure with high accuracy by reducing the influence of temperature. SOLUTION: In a centrifugal differential pressure generating device for generating differential pressure of gas by the rotation of a rotor 11 provided with a passage from the rotational center side to the peripheral edge part side, a case 15 for enclosing the rotor 11 is submerged in a constant temperature liquid bath, or a low pressure side pressure takeoff port and a high pressure side pressure takeoff port are connected to a buffer tank 3, or the buffer tank 3 is submerged in a constant temperature liquid bath 42, or at least a part of piping is provided with a solenoid valve, or a pressure gauge, a temperature gauge, a hygrometer and an arithmetic unit 5 are provided, and the measured value are inputted to the arithmetic unit 5 to correct density of gas.