INTERFEROMETER MEASURING SYSTEM USING A PLURALITY OF SYNCHRONOUS LIGHT SOURCE

PROBLEM TO BE SOLVED: To measure the displacements of one or more moving stages by using one or more light sources. SOLUTION: This is the device for synchronizing the measurements of two interferometers 40 and 41 using two light sources 20 and 22. The light sources 20 and 22 output single straight-l...

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Bibliographische Detailangaben

1. Verfasser:	REDLITZ KURT R
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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