MICRO PUMP

PROBLEM TO BE SOLVED: To increase diaphragm durability and improve pressurizing effect by providing a diaphragm for closing the upper side of an opening drilled through a substrate, and forming a pumping object fluid passage substantially analogous to the cross section of the expanded part of the di...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KONO TAKASHI, ANDO SHINJI, NOGI MORINOBU, ANDO MITSUHIRO, IRISA KOICHI, NARUSE YOSHIHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS TRANSPORTING WEAPONS
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