SPLASHED PARTICLE REMOVING DEVICE
PROBLEM TO BE SOLVED: To prevent the adhesion of debris to a laser beam incident window and to enable the irradiation with the laser beam stably over a long time by supplying a high-polymer film in a direction intersecting with the optical axis of the laser beam between the laser beam incident windo...
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| creator | ISHITA AKIRA I YOKI |
| description | PROBLEM TO BE SOLVED: To prevent the adhesion of debris to a laser beam incident window and to enable the irradiation with the laser beam stably over a long time by supplying a high-polymer film in a direction intersecting with the optical axis of the laser beam between the laser beam incident window and a target. SOLUTION: A motor 4 is driven to rotate a driving reel 5 at the time of irradiation or stopping of the irradiation with a laser X-ray generator having a splashed particles remover 3. As a result, tension acts on the high-polymer film, such as polyethylene(PE) film, from the driving reel 5 and a driven reel 6 is rotated by the tension, by which the PE film 8 is moved from the driven reel 6 and is taken up on the driving reel 5. The surface adhered with the debris of the PE film 8 parts from the optical path and the fresh surface not adhered with the debris exists in the optical path. When a next excited laser is emitted, the excited laser beam transmits the fresh part not adhered with the debris of the PE film 8 and is smoothly cast to the target 11. |
| format | Patent |
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SOLUTION: A motor 4 is driven to rotate a driving reel 5 at the time of irradiation or stopping of the irradiation with a laser X-ray generator having a splashed particles remover 3. As a result, tension acts on the high-polymer film, such as polyethylene(PE) film, from the driving reel 5 and a driven reel 6 is rotated by the tension, by which the PE film 8 is moved from the driven reel 6 and is taken up on the driving reel 5. The surface adhered with the debris of the PE film 8 parts from the optical path and the fresh surface not adhered with the debris exists in the optical path. When a next excited laser is emitted, the excited laser beam transmits the fresh part not adhered with the debris of the PE film 8 and is smoothly cast to the target 11.</description><edition>6</edition><language>eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>1998</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19980512&DB=EPODOC&CC=JP&NR=H10121231A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76516</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19980512&DB=EPODOC&CC=JP&NR=H10121231A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ISHITA AKIRA</creatorcontrib><creatorcontrib>I YOKI</creatorcontrib><title>SPLASHED PARTICLE REMOVING DEVICE</title><description>PROBLEM TO BE SOLVED: To prevent the adhesion of debris to a laser beam incident window and to enable the irradiation with the laser beam stably over a long time by supplying a high-polymer film in a direction intersecting with the optical axis of the laser beam between the laser beam incident window and a target. SOLUTION: A motor 4 is driven to rotate a driving reel 5 at the time of irradiation or stopping of the irradiation with a laser X-ray generator having a splashed particles remover 3. As a result, tension acts on the high-polymer film, such as polyethylene(PE) film, from the driving reel 5 and a driven reel 6 is rotated by the tension, by which the PE film 8 is moved from the driven reel 6 and is taken up on the driving reel 5. The surface adhered with the debris of the PE film 8 parts from the optical path and the fresh surface not adhered with the debris exists in the optical path. When a next excited laser is emitted, the excited laser beam transmits the fresh part not adhered with the debris of the PE film 8 and is smoothly cast to the target 11.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1998</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFAMDvBxDPZwdVEIcAwK8XT2cVUIcvX1D_P0c1dwcQ3zdHblYWBNS8wpTuWF0twMim6uIc4euqkF-fGpxQWJyal5qSXxXgEehgaGRoZGxoaOxsSoAQAaiiI_</recordid><startdate>19980512</startdate><enddate>19980512</enddate><creator>ISHITA AKIRA</creator><creator>I YOKI</creator><scope>EVB</scope></search><sort><creationdate>19980512</creationdate><title>SPLASHED PARTICLE REMOVING DEVICE</title><author>ISHITA AKIRA ; I YOKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JPH10121231A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1998</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>ISHITA AKIRA</creatorcontrib><creatorcontrib>I YOKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ISHITA AKIRA</au><au>I YOKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SPLASHED PARTICLE REMOVING DEVICE</title><date>1998-05-12</date><risdate>1998</risdate><abstract>PROBLEM TO BE SOLVED: To prevent the adhesion of debris to a laser beam incident window and to enable the irradiation with the laser beam stably over a long time by supplying a high-polymer film in a direction intersecting with the optical axis of the laser beam between the laser beam incident window and a target. SOLUTION: A motor 4 is driven to rotate a driving reel 5 at the time of irradiation or stopping of the irradiation with a laser X-ray generator having a splashed particles remover 3. As a result, tension acts on the high-polymer film, such as polyethylene(PE) film, from the driving reel 5 and a driven reel 6 is rotated by the tension, by which the PE film 8 is moved from the driven reel 6 and is taken up on the driving reel 5. The surface adhered with the debris of the PE film 8 parts from the optical path and the fresh surface not adhered with the debris exists in the optical path. When a next excited laser is emitted, the excited laser beam transmits the fresh part not adhered with the debris of the PE film 8 and is smoothly cast to the target 11.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | SPLASHED PARTICLE REMOVING DEVICE |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-19T09%3A45%3A49IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=ISHITA%20AKIRA&rft.date=1998-05-12&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJPH10121231A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |