SPLASHED PARTICLE REMOVING DEVICE

PROBLEM TO BE SOLVED: To prevent the adhesion of debris to a laser beam incident window and to enable the irradiation with the laser beam stably over a long time by supplying a high-polymer film in a direction intersecting with the optical axis of the laser beam between the laser beam incident window and a target. SOLUTION: A motor 4 is driven to rotate a driving reel 5 at the time of irradiation or stopping of the irradiation with a laser X-ray generator having a splashed particles remover 3. As a result, tension acts on the high-polymer film, such as polyethylene(PE) film, from the driving reel 5 and a driven reel 6 is rotated by the tension, by which the PE film 8 is moved from the driven reel 6 and is taken up on the driving reel 5. The surface adhered with the debris of the PE film 8 parts from the optical path and the fresh surface not adhered with the debris exists in the optical path. When a next excited laser is emitted, the excited laser beam transmits the fresh part not adhered with the debris of the PE film 8 and is smoothly cast to the target 11.