PRODUCTION OF THIN-FILM MAGNETIC HEAD DEVICE

PRODUCTION OF THIN-FILM MAGNETIC HEAD DEVICE

PROBLEM TO BE SOLVED: To greatly improve the yield and reliability of products by easily and surely washing away sub-deposits by an ordinary washing method even if these sub-deposits are deposited on a thin-film magnetic head part forming surface at the time of subjecting the slider surface of a non...

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1. Verfasser: BABA KENICHI
Format: Patent
Sprache:eng
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INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
PHYSICS
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description PROBLEM TO BE SOLVED: To greatly improve the yield and reliability of products by easily and surely washing away sub-deposits by an ordinary washing method even if these sub-deposits are deposited on a thin-film magnetic head part forming surface at the time of subjecting the slider surface of a nonmagnetic block on which formed with the thin-film magnetic head part is formed, to dry etching. SOLUTION: A fixing plate on which the nonmanagement block 31 is place at the time of etching is formed as a protective member and the fixing plate 33 consisting of carbon and having 2mm thickness is used as this protective member. The fixing plate 33 having the nonmagnetic block 31 placed and fixed, is installed on a substrate stage 34 having the substrate electrodes built in, and installed within a high vacuum vessel of an etching device and is subjected to the prescribed dry etching.
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SOLUTION: A fixing plate on which the nonmanagement block 31 is place at the time of etching is formed as a protective member and the fixing plate 33 consisting of carbon and having 2mm thickness is used as this protective member. 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subjects INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
PHYSICS
title PRODUCTION OF THIN-FILM MAGNETIC HEAD DEVICE
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